The JXA-8900 SuperProbe is a high resolution SEM and a WD/ED Combined Electron Probe Microanalyzer (EPMA). The combination of up tp 5 wavelength dispersive X-ray spectrometers (WDS) and an energy dispersive X-ray spectrometer (EDS) assures the most efficient and accurate analysis. Computer input analyzes data from the two types of X-ray spectrometers and presents the data as a unified analysis.

The WD/ED combined system can simultaneously analyze up to 13 elements (5 WDS, 8 EDS). The backscattered electron image, provided by a highly sensitive solid state detector, and the secondary electron image, brings the total obtainable signals to 15.

The WD/ED combined microanalyzer provides for:

  • higher detection sensitivity for trace elements
  • higher accuracy of quantitative analysis
  • higher resolving power (resolution) for adjacent X-rays
  • higher accuracy of quantitative analysis for light elements